題組內容

MOS capacitor and MOSFET
5.Assumed that there is an Al/ SiO2/ p -Si metal-oxide-semiconductor (MOS) capacitor. Denote the permittivity of SiO2 (Si) as61bace4abec7f.jpg and it is given that the thickness of SiO2 is 61bace7d72ac1.jpg, the p-Si is uniformly doped to NA, and the MOS capacitor can be regarded as one-dimensional.

(c) Please explain what CMOS logics are and their advantages over p-MOS/n-MOS technology for VLSIs of high integration level. (6%)