MOS capacitor and MOSFET
5.Assumed that there is an Al/ SiO2/ p -Si metal-oxide-semiconductor (MOS) capacitor. Denote the permittivity
of SiO2 (Si) as
and it is given that the thickness of SiO2 is
, the p-Si is uniformly doped to NA, and
the MOS capacitor can be regarded as one-dimensional.
(b) Denote the work function of Al as ΦM. If there is now fixed charges density (per unit area) (QF) at the SiO2/Si interface, write down, without derivation, the threshold voltage
for the MOS capacitor. Note that you have to express the work function of Si in term of
. (6%)