申論題

MOS capacitor and MOSFET
5.Assumed that there is an Al/ SiO₂/ p -Si metal-oxide-semiconductor (MOS) capacitor. Denote the permittivity of SiO₂ (Si) as and it is given that the thickness of SiO2 is , the p-Si is uniformly doped to N_A, and the MOS capacitor can be regarded as one-dimensional.

(c) Repeat (b), i.c., write down , for an Al/ SiO₂ /n -Si structure, albeit with N_A replaced by N_D. Denote again the metal work function asΦ_M and express the work function of Si in tem of . (6%)