題組內容

MOS capacitor and MOSFET
5.Assumed that there is an Al/ SiO2/ p -Si metal-oxide-semiconductor (MOS) capacitor. Denote the permittivity of SiO2 (Si) as61bace4abec7f.jpg and it is given that the thickness of SiO2 is 61bace7d72ac1.jpg, the p-Si is uniformly doped to NA, and the MOS capacitor can be regarded as one-dimensional.

(a) Given that the work function of the Al is slightly larger than 61baceea26300.jpg, the electron affinity of Si, and assumed that the oxide is perfect (completely insulating, no fixed charge/interface states within the oxide and at the interface), please plot the band diagrams of the MOS capacitor when the MOS capacitor is biased at equilibrium and threshold, respectively. You have to include 61bacf3a1708d.jpg (vacuum level), Ec (conduction band edge), Ei (intrinsic level) , Ev (valence band edge) and EF (Fermi level) in you plots. Please also indicate on you plot the condition that the MOS structure reaches threshold. (10%)