題組內容
MOS capacitor and MOSFET
5.Assumed that there is an Al/ SiO2/ p -Si metal-oxide-semiconductor (MOS) capacitor. Denote the permittivity
of SiO2 (Si) as
and it is given that the thickness of SiO2 is
, the p-Si is uniformly doped to NA, and
the MOS capacitor can be regarded as one-dimensional.
(d) Explain the difference between enhancement type and depletion type, for both n-channel MOSFET and p-channel MOSFET, in term of threshold voltage. If the Al / SiO2 / p - Si MOS structure in (a) is part of an MOSFET, is this MOSFET enhancement type or depletion type? Repeat for the Al / SiO2 /n- Si MOS structure in (c). (3%, 2%,2%)